Madou, M. J. (2011). Fundamentals of microfabrication and nanotechnology: From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications (Third edition.). Boca Raton, Florida ; London, [England] ; New York: CRC Press.
Chicago Style CitationMadou, Marc J.. Fundamentals of Microfabrication and Nanotechnology: From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications. Third edition. Boca Raton, Florida ; London, [England] ; New York: CRC Press, 2011.
MLA CitationMadou, Marc J.. Fundamentals of Microfabrication and Nanotechnology: From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications. Third edition. Boca Raton, Florida ; London, [England] ; New York: CRC Press, 2011.
Warning: These citations may not always be 100% accurate.