Madou, M. J. (2011). Fundamentals of microfabrication and nanotechnology: From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications (Third edition.). Boca Raton, Florida ; London, [England] ; New York: CRC Press.
Citación estilo ChicagoMadou, Marc J.. Fundamentals of Microfabrication and Nanotechnology: From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications. Third edition. Boca Raton, Florida ; London, [England] ; New York: CRC Press, 2011.
Cita MLAMadou, Marc J.. Fundamentals of Microfabrication and Nanotechnology: From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications. Third edition. Boca Raton, Florida ; London, [England] ; New York: CRC Press, 2011.
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