TY  - GEN
T1  - Fundamentals of microfabrication and nanotechnology. from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications
A1  - Madou, Marc J.,
LA  - English
PP  - Boca Raton, Florida ; London, England ; New York
PB  - CRC Press
YR  - 2011
ED  - Third edition.
UL  - https://colectivo.uloyola.es/Record/ELB141910
OP  - 642
CN  - TK7875 .M336 2011
SN  - 9781439895245 (e-book)
KW  - Microelectromechanical systems.
KW  - Nanoelectromechanical systems.
KW  - Microfluidics.
KW  - Solid state physics.
KW  - Electronic books.
ER  -