Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications - Madou, Marc J. (Boca Raton, Florida ; London, [England] ; New York : CRC Press, 2011)
Includes bibliographical references at the end of each chapters.
Description based on metadata supplied by the publisher and other sources.
Electronic reproduction. Santa Fe, Arg.: elibro, 2020. Available via World Wide Web. Access may be limited to eLibro affiliated libraries.
Keywords: Microelectromechanical systems; Nanoelectromechanical systems; Microfluidics; Solid state physics; Electronic books