TY  - GEN
T1  - Adhesion aspects in MEMS/NEMS
A2  - Kim, Seong H.
A2  - Dugger, M. T.
A2  - Mittal, K. L., 1945-
LA  - English
PP  - Leiden Netherlands ; Boston
PB  - VSP
YR  - 2010
UL  - https://colectivo.uloyola.es/Record/ELB145483
OP  - 409
CN  - TK7875 .A34 2010
KW  - Microelectromechanical systems.
KW  - Nanoelectromechanical systems.
KW  - Adhesion.
KW  - Surfaces (Technology)
KW  - Electronic books.
ER  -