Computational lithography - Ma, Xu, 1983-; Arce, Gonzalo R. (Oxford : Wiley-Blackwell, 2010)
Includes bibliographical references and index.
Description based on metadata supplied by the publisher and other sources.
Electronic reproduction. Santa Fe, Arg.: elibro, 2021. Available via World Wide Web. Access may be limited to eLibro affiliated libraries.
Keywords: Microlithography -- Mathematics; Integrated circuits -- Design and construction -- Mathematics; Photolithography -- Mathematics; Semiconductors -- Etching -- Mathematics; Resolution (Optics); Electronic books