TY  - GEN
T1  - Atomic layer deposition principles, characteristics, and nanotechnology applications
A1  - Kaariainen, Tommi.
LA  - English
PP  - Hoboken, NJ
PB  - John Wiley & Sons
YR  - 2013
ED  - 2nd ed.
UL  - https://colectivo.uloyola.es/Record/ELB179453
OP  - 253
CN  - TS695 .K33 2013
SN  - 9781118747421 (electronic bk.)
KW  - Chemical vapor deposition.
KW  - Epitaxy.
KW  - Microelectronics.
KW  - Nanotechnology.
KW  - Electronic books.
ER  -