Atomic layer deposition principles, characteristics, and nanotechnology applications - Kaariainen, Tommi (Hoboken, NJ : John Wiley & Sons, 2013)
Includes bibliographical references and index.
Description based on metadata supplied by the publisher and other sources.
Electronic reproduction. Santa Fe, Arg.: elibro, 2022. Available via World Wide Web. Access may be limited to eLibro affiliated libraries.
Keywords: Chemical vapor deposition; Epitaxy; Microelectronics; Nanotechnology; Electronic books