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Adhesion aspects in MEMS/NEMS /

Bibliographic Details
Other Authors: Kim, Seong H., Dugger, M. T., Mittal, K. L., 1945-
Format: eBook
Language:English
Published: Leiden [Netherlands] ; Boston : VSP, 2010.
Subjects:
Microelectromechanical systems.
Nanoelectromechanical systems.
Adhesion.
Surfaces (Technology)
Electronic books.
Online Access:https://recursos.uloyola.es/login?url=https://accedys.uloyola.es:8443/accedix0/sitios/ebook.php?id=145483
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