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Adhesion aspects in MEMS/NEMS /

Bibliographic Details
Other Authors:	Kim, Seong H., Dugger, M. T., Mittal, K. L., 1945-
Format:	eBook
Language:	English
Published:	Leiden [Netherlands] ; Boston : VSP, 2010.
Subjects:	Microelectromechanical systems. Nanoelectromechanical systems. Adhesion. Surfaces (Technology) Electronic books.
Online Access:	https://recursos.uloyola.es/login?url=https://accedys.uloyola.es:8443/accedix0/sitios/ebook.php?id=145483

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