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Atomic layer deposition principles, characteristics, and nanotechnology applications /

Bibliographic Details
Main Author:	Kaariainen, Tommi.
Format:	Electronic
Language:	English
Published:	Hoboken, NJ : John Wiley & Sons, c2013.
Edition:	2nd ed.
Subjects:	Chemical vapor deposition. Epitaxy. Microelectronics. Nanotechnology. Electronic books.
Online Access:	https://recursos.uloyola.es/login?url=https://accedys.uloyola.es:8443/accedix0/sitios/ebook.php?id=179453

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