Atomic layer deposition principles, characteristics, and nanotechnology applications /
| Main Author: | |
|---|---|
| Format: | Electronic |
| Language: | English |
| Published: |
Hoboken, NJ :
John Wiley & Sons,
c2013.
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| Edition: | 2nd ed. |
| Subjects: | |
| Online Access: | https://recursos.uloyola.es/login?url=https://accedys.uloyola.es:8443/accedix0/sitios/ebook.php?id=179453 |