Fundamentals of microfabrication and nanotechnology. from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications / Volume III :
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| Format: | eBook |
| Language: | English |
| Published: |
Boca Raton, Florida ; London, [England] ; New York :
CRC Press,
2011.
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| Edition: | Third edition. |
| Subjects: | |
| Online Access: | https://recursos.uloyola.es/login?url=https://accedys.uloyola.es:8443/accedix0/sitios/ebook.php?id=141910 |